Applicable to U series and standard overhaul except Array.
ULVAC Repair Kit
Product descriptionApplicable to U series and standard overhaul except Array.
| Check List | |
| Product name | Quantity |
| Tightening envelope | 2 |
| Sealing ring | 1 |
| Screw | 1 |
| Envelope | 1 |
| Fixed connector | 1 |
| Guide ring | 2 |
| Spring | 4 |
| Vent valve | 2 |
| Air intake envelope | 1 |
| Nuts | 3 |
| Bearing | 5 |
| Male connector | 2 |
| Fixing ring | 1 |
| Indium sheet | 1 |
| Sealing ring | 19 |