Product description of Roots dry vacuum ...
Product descriptionRoots dry vacuum pump unit (JGM series) is characterized by oil free,clean vacuum environment, discharging condensable gas, direct start, faststart, high pumping speed, high vacuum, realization of continuous run, zeromaintenance, low energy consumption, small volume and low noise.
Main application fields: main application fields include oil freepumping system of integrated circuit and solar cells and other equipment.Applicable to process with intermediate corrosion and cleaning processenvironment such as sample room, transmission cavity, PVD, silicon etch, metaletch, measuring and photoetching.
Otherapplication fields include removal of non-corrosive gas in vacuum degassing,vacuum melting, molten steel vacuum disposal, and spatial simulation and lowdensity wind tunnel of vacuum metallurgical industry and distillation,evaporation and drying, etc in Industry of chemical engineering, food, medicineand electric motor manufacture.
